The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2004
Filed:
Sep. 10, 2002
Torbjörn Sandström, Pixbo, SE;
Anna-Karin Holmér, Pixbo, SE;
Kenneth Wilhelmsson, Partille, SE;
Micronic Laser Systems AB, Taby, SE;
Abstract
The present invention relates to a device for homogenizing the spatial intensity distribution of a spatially coherent radiation beam. The device includes a grating arranged in the propagation path of a spatially coherent radiation beam for diffracting the coherent beam and thus decreasing the coherence length of a diffracted radiation beam in a direction orthogonal to the propagation direction of the radiation beam relative to the width of the radiation beam in the orthogonal direction; and a radiation splitting and directing arrangement arranged in the propagation path of the diffracted radiation beam for splitting the diffracted radiation beam into spatially separated portions and for superimposing the spatially separated portions to form a radiation beam having a homogenized spatial intensity distribution.