The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2004
Filed:
Oct. 22, 2002
Christopher James Evans, Higganum, CT (US);
Michael Küchel, Oberkochen, DE;
Carl A. Zanoni, Middlefield, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An optical sphere of nominal radius is positioned and supported within an assembly so that is can be activated with a predetermined motion with respect to an incoming converging spherical wavefront from an interferometer to calibrate the interferometer by determining the differences between the converging spherical wavefront and the reflected wavefront from portions of the area of the optical sphere as sampled thereover. The nominal optical sphere supported and sampled in this way mimics a “perfect” comparison sphere from which the systematic error of the interferometer wavefront may be determined. The optical sphere is preferably hollow and composed of Zerodur®. Internal magnets in conjunction with external induction coils provide motion control while the optical sphere is mounted on an air bearing for freedom of rotation and safety in transportation.