The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2004
Filed:
Oct. 11, 2000
Carola Blaesing-Bangert, Huettenberg, DE;
Ulrich Kaczynski, Bad Nauheim, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
The invention discloses a substrate holder ( ) that is configured to receive a substrate ( ) and can be utilized to determine the thickness deviation of a substrate from the standard thickness of a specific substrate type. The substrate holder ( ) comprises a one-piece frame having a flat upper surface ( ). An opening ( ) that defines a peripheral rim ( ) is provided in the substrate holder ( ). Receiving elements ( ) on which spheres are provided are shaped onto the peripheral rim ( ) of the opening ( ). A substrate ( ) placed into the substrate holder ( ) thus comes to rest on the upper surfaces of the spheres. The support elements ( ) are arranged on the peripheral rim of the opening ( ) in such a way that they lie at the vertices of an equilateral triangle. In addition, the spacing from the upper surface of the spheres to the flat upper surface ( ) of the substrate holder ( ) is dimensioned such that said spacing corresponds substantially to the standard thickness of the substrate type being used.