The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Oct. 25, 2002
Natsushi Suzuki, Tochigi, JP;
Hisashi Nara, Tochigi, JP;
Shunsuke Yoshioka, Tochigi, JP;
Toshimitsu Barada, Tokyo, JP;
Atsushi Ooyama, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Shinichi Sekiguchi, Tokyo, JP;
Hiroyuki Shinozaki, Tokyo, JP;
Other;
Abstract
An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) ( - ) of a magnetic bearing ( ) for supporting a rotary shaft ( ) of a circulation fan includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires ( ) of a radial magnetic bearing ( ) can be isolated from a corrosive atmosphere by means of a separation wall ( ) while projecting portions of cores ( ) extend through the separation wall ( ) and are exposed toward a magnetic bearing rotor ( ).