The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Aug. 05, 2002
Sanjiv M. Bhatt, Minnetonka, MN (US);
Shawn D. Eggum, Lonsdale, MN (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A process for manufacturing a wafer carrier including injection molding a wafer support structure. The wafer support structure has a plurality of wafer support shelves extending therefrom. The process further includes molding a wafer contact portion on each of the wafer support shelves. The wafer contact portions bond with the wafer support shelves without mechanical fasteners between the wafer contact portions and the wafer support shelves. The process also includes overmolding a shell over the wafer support structure to form the wafer carrier. The shell bonds with the wafer support structure without mechanical fasteners between the shell and the wafer support structure. The wafer contact portions define a plurality of slots for holding a plurality of wafers.