The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Dec. 03, 2002
Applicant:
Inventors:
Xiaoming Hu, Chandler, AZ (US);
James B. Craigo, Tempe, AZ (US);
Ravindranath Droopad, Chandler, AZ (US);
John L. Edwards, Jr., Phoenix, AZ (US);
Yong Liang, Gilbert, AZ (US);
Yi Wei, Chandler, AZ (US);
Zhiyi Yu, Gilbert, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1461 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/1461 ; H01L 2/14763 ;
Abstract
A method for removing silicon oxide from a surface of a substrate is disclosed. The method includes depositing material onto the silicon oxide ( ) and heating the substrate surface to a sufficient temperature to form volatile compounds including the silicon oxide and the deposited material ( ). The method also includes heating the surface to a sufficient temperature to remove any remaining deposited material ( ).