The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Jul. 05, 2001
Applicant:
Inventors:
Assignee:
Renesas Technology Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18238 ;
U.S. Cl.
CPC ...
H01L 2/18238 ;
Abstract
With a gate electrode and side wall spacers being used as masks, ions of an n-type impurity are implanted from the normal line direction of a substrate, whereby source/drain diffused regions are formed. Then, ions of an n-type impurity are introduced by oblique implantation having a predetermined angle relative to the normal line direction of the substrate to form an n-type semiconductor region having an impurity concentration higher than source/drain extended regions. By this method, the junction depth of the semiconductor region becomes smaller than that of the source/drain diffused regions and greater than that of the source/drain extended regions.