The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
Jun. 18, 2002
Applicant:
Inventors:
Timothy A. Rost, Plano, TX (US);
Deems Randy Hollingsworth, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1301 ;
U.S. Cl.
CPC ...
H01L 2/1301 ;
Abstract
Disclosed are apparatus and method for limiting mobile charge ( ) ingress within a silicon-on-insulator (SOI) substrate ( ). A mask ( ) is applied to the substrate to form an aperture ( ) over a desired portion of the substrate near its outer edge. A buffer material ( ), selected to impede mobile charge ingress, is implanted ( ) through the aperture into the insulator layer ( ) of the substrate to form a buffer structure ( ).