The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
Dec. 23, 2003
Cha Deok Dong, Icheon-si, KR;
II Keoun Han, Icheon-si, KR;
Hynix Semiconductor Inc., Kyungki, KR;
Abstract
Provided is a method of forming a gate electrode in a flash memory device including the steps of sequentially forming a tunnel oxide film and an undoped first polysilicon film on a semiconductor substrate, forming a doped second polysilicon film having a given doping concentration on the undoped first polysilicon film, sequentially forming a dielectric film and a third polysilicon film on the results, patterning the results to form a floating gate electrode pattern, a dielectric film and a control gate electrode pattern, and performing an oxidization process for the results to form a sidewall oxide film in the floating gate electrode pattern and the sidewall of the control gate electrode pattern. As such, by using the second polysilicon film having the given doping concentration, a thickness of the sidewall oxide film formed at the gate electrode sidewall can be uniformly controlled. It is therefore possible to secure the CD of a gate electrode.