The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
Jan. 15, 2002
Applicant:
Inventors:
Xiaoliang Jin, San Jose, CA (US);
Shulin Wang, Campbell, CA (US);
Lee Luo, Fremont, CA (US);
Henry Ho, San Jose, CA (US);
Steven A. Chen, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; H01L 2/1306 ; B05C 1/300 ;
U.S. Cl.
CPC ...
C23C 1/600 ; H01L 2/1306 ; B05C 1/300 ;
Abstract
An apparatus that includes a pumping plate having a skirt, where the skirt contains a number of holes and a wafer access slot, and where the number of holes are sized and positioned to provide uniform heating of a susceptor.
Jin, Xiaoliang. (2004). Emissivity-change-free pumping plate kit in a single wafer chamber (U.S. Patent No. 6802906). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6802906
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile