The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Mar. 21, 2000
Applicant:
Inventors:
Tadahiro Ohmi, Miyagi-ken, JP;
Nobumasa Suzuki, Utsunomiya, JP;
Hiroshi Ohsawa, Utsunomiya, JP;
Nobuyoshi Tanaka, Tokyo, JP;
Toshikuni Shinohara, Sendai, JP;
Masaki Hirayama, Sendai, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/00 ; H01S 3/22 ;
U.S. Cl.
CPC ...
H01S 3/00 ; H01S 3/22 ;
Abstract
An excimer laser gas in a laser tube is excited by a microwave introduced from awaveguide , and electric field concentration occurs in a slit-shaped gap provided in a plate member , causing plasma discharge. Then the phase of plasma light is regulated and the light is resonated, to cause excimer laser light. This construction realizes plasma excitation entirely uniform along a lengthwise direction of laser light emission, and enables uniform laser light emission with minimum energy loss.