The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Jan. 14, 2003
Byoung Hun Lee, Wappingers Falls, NY (US);
Bachir Dirahoui, Bedford Hills, NY (US);
Effendi Leobandung, Wappingers Falls, NY (US);
Tai-Chi Su, Woodbury, CT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An integrated circuit employing CMOS technology employs a process integration that combines a source/drain silicide with a replacement gate process using a triple layer hardmask that is consumed during the course of processing in which a first temporary gate sidewall spacer defines an area for the formation of the raised source and drain and a second temporary spacer defines an area for the implant of the source and drain and for the siliciding of the source and drain while the temporary gate is protected from silicidaiton by the hardmask.