The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Jan. 23, 2002
Applicant:
Inventors:
David Charles Brady, Windermere, FL (US);
Steven M. Browne, Orlando, FL (US);
James L. Flack, Oviedo, FL (US);
Mark K. Mitchell, Winter Park, FL (US);
Assignee:
Agere Systems, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 5/334 ; B01D 4/700 ;
U.S. Cl.
CPC ...
B01D 5/334 ; B01D 4/700 ;
Abstract
An abatement system and method for the abatement of contaminants of effluent gases produced during the manufacture of semiconductor devices. A burn/wet scrubber is provided at the device fabrication site where toxic effluent gases are produced. The burn/wet scrubber oxidizes and condenses toxic compounds. Wastewater used to condense oxidized toxic gases is treated locally in an ion exchange filter. The treated wastewater is then directed to a centralized wastewater treatment facility.