The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Oct. 22, 2002
Applicant:
Inventor:
Peter Vogt, Heidenheim, DE;
Assignee:
Carl Zeiss SMT AG, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 ; G03B 2/742 ;
U.S. Cl.
CPC ...
G02B 7/02 ; G03B 2/742 ;
Abstract
In a method for applying a scale ( ) to a carrier ( ), a material layer ( ) is applied to the carrier in such a way that the change in length on account of temperature change of the material layer ( ) corresponds at least approximately to changes in length of the carrier ( ) on account of temperature change. The scale ( ) is introduced into or applied to the material layer ( ) with a measuring graduation ( ). The carrier may be an optical element, e.g. a lens ( ) of an objective ( ) for semiconductor lithography.