The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 2004

Filed:

Mar. 27, 2003
Applicant:
Inventors:

Kazuyuki Hiramoto, Tokyo, JP;

Takashi Kanno, Koshigaya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 2/100 ;
U.S. Cl.
CPC ...
G01N 2/100 ;
Abstract

This device is provided with an elliptical mirror , a light source that radiates coherent light towards an inspected edge arranged near the location of its first focal point, a light blocking member that blocks diffracted light of a low order that is radiated from light source and reflected by inspected edge , and a photo detector arranged at the location of a second focal point of the elliptical mirror . The light blocking member is composed of a light absorbing member arranged on the mirrored surface of elliptical mirror reached by the low order diffracted right.


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