The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Jul. 26, 2002
Other;
Abstract
According to the invention, in selecting an analyzed area of a scanning atom probe (SAP), there is adopted a method of using a tip of the lead-out electrode of SAP as a scanning probe of a scanning tunneling microscope (STM) and drawing a surface shape of a sample to thereby select the analyzed area and with regard to the tip of the lead-out electrode of SAP, there is formed an exclusive probe in a needle-like shape by a CVD micromaching technology or a lithographic method using focused ion beam in order to promote accuracy of the scanning probe of STM. Further, a conical dome of a conductive material is formed at the tip of the conical electrode mechanically formed by using a CVD fabricating method using focused ion beam and the tip is shaped by sputter etching to thereby form the lead-out electrode near to an ideal shape.