The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Apr. 30, 2003
Oleg Gluschenkov, Wappingers Falls, NY (US);
Michael P. Chudzik, Beacon, NY (US);
Rajarao Jammy, Wappingers Falls, NY (US);
Christopher C. Parks, Poughkeepsie, NY (US);
Kenneth T. Settlemyer, Jr., Poughquag, NY (US);
Radhika Srinivasan, Mahwah, NJ (US);
Kathryn H. Varian, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A 3D microelectronic structure is provided which includes a substrate having at least one opening present therein, the at least one opening having sidewalls which extend to a common bottom wall; and a thermal nitride layer present on at least an upper portion of each sidewall of openings. A method for fabricating the above-mentioned 3D microelectronic structure is also provided. Specifically, the method includes a step of selectively forming a thermal nitride layer on at least an upper portion of each sidewall of an opening formed in a substrate.