The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Mar. 20, 2001
Yuichi Takano, Nishinomiya, JP;
Koichi Terao, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A glass material for use in a microwave-transparent window of a plasma processing apparatus is provided. The glass material has not only good properties similar to those of quartz glass but a corrosion resistance particularly to fluorine-containing plasma. The glass having the corrosion resistance to the fluorine-containing plasma is composed of a first glass phase consisting of Si and O and a second glass phase consisting of Si, Al and O. The second glass phase has a mass ratio of Al to Si of at least 0.01. The glass member is useful as a component for forming an electromagnetic-wave introducing window of the plasma processing apparatus or the like.