The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2004
Filed:
Mar. 08, 2002
Applicant:
Inventors:
Tomoya Yoshizawa, Utsumomiya, JP;
Kunio Otsuki, Kyoto, JP;
Assignee:
Horiba, Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 ;
U.S. Cl.
CPC ...
G01J 4/00 ;
Abstract
A film thickness measuring apparatus capable of restricting a measurement area on the surface of a sample is provided. An incident optical system provides an irradiating polarized light to the surface of the sample. A detecting optical system receives the reflected light having an elliptical polarization and provides a reduced aperture that can restrict the light provided through a fiber optic conduit to a spectrometer and thereby eliminate aberrations and noise problems.