The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2004
Filed:
Sep. 29, 2003
Koji Kawaguchi, Nirasaki, JP;
Masashi Shimizu, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
In the bottom face of a head plate ( ), a recessed portion ( A) open to the front of a prober chamber ( ) is formed. In the recessed portion ( A), a card exchange mechanism ( ) for exchanging a probe card ( ) is arranged. The exchange mechanism ( ) includes a card supporting member ( ) for supporting thereon the probe card ( ), retractable mechanisms ( ), air cylinders ( ) and cam mechanisms ( ). The retractable mechanisms ( ) are designed to move the supporting member ( ) in substantially horizontal directions between a connecting position of the probe card ( ) corresponding to a pogo ring ( ), and a region near a side opening of a case ( C). The air cylinders ( ) and the cam mechanisms ( ) are designed to move the supporting member ( ) in vertical directions with respect to the head plate ( ) so as to connect/disconnect the probe card ( ) to/from a test head ( ) via the pogo ring ( ).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile