The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Oct. 25, 2002
Applicant:
Inventor:
Johannes Rau, Gerstetten, DE;
Assignee:
Carl Zeiss SMT AG, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 ;
U.S. Cl.
CPC ...
G02B 7/02 ;
Abstract
The invention relates to a securing arrangement for a mount of an optical element, in particular in a lens systems for semi-conductor lithography, on a component. The mount is mounted, via three bearing bodies, in corresponding bearing locations of the component in each case. The mount and the component are held together via magnetic forces. The magnetic flux in the component ( ) is obstructed in the region of the bearing locations ( ) by a section ( ) of relatively low permeability and can be short-circuited via the bearing bodies ( ), made of magnetically highly permeable material, upon connection of the mount ( ) and component ( ) by at least one magnet.