The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Jul. 15, 2003
Hann-Jye Hsu, Taichung Hsien, TW;
Chih-Wei Hung, Hsin-chu, TW;
Powerchip Semiconductor Corp., Hsinchu, TW;
Abstract
A method of fabricating a memory device structure, where the method includes the steps of forming a tunnel oxide layer, a silicon nitride layer and a silicon oxide layer. A conductive layer is then formed on top of the silicon oxide. The conductive layer is then patterned to form a conductive gate layer. The silicon oxide layer is patterned during the same step of patterning the conductive layer, exposing the silicon nitride layer. Following that, a blanket dielectric layer is then formed on the substrate. This blanket dielectric layer is patterned with one etch step to form a spacer wall at the sides of the conductive gate layer.