The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6790589 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 14, 2004

Filed:

Dec. 21, 2001
Applicant:
Inventors:

Satoshi Takechi, Kawasaki, JP;

Makoto Takahashi, Kawasaki, JP;

Yuko Kaimoto, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ;
U.S. Cl.
CPC ...
G03F 7/004 ;
Abstract

A radiation sensitive material comprising a copolymer including itaconic anhydride and methods of using such radiation sensitive materials in methods for forming a pattern.


Find Patent Forward Citations

Takechi, Satoshi. (2004). Radiation sensitive material and method for forming pattern (U.S. Patent No. 6790589). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6790589

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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