The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Mar. 06, 2003
Applicant:
Inventors:
Assignee:
Leica Microsystems Jena GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 4/907 ;
U.S. Cl.
CPC ...
B65G 4/907 ;
Abstract
The invention relates to an arrangement for transporting and inspecting semiconductor substrates ( ), having at least three workstations ( ), a changer ( ), which has at least three arms ( ) which are designed to load the individual workstations ( ) with semiconductor substrates ( ). A measuring device ( ) is assigned to the second workstation ( ), determines the deviation of the current position of the semiconductor substrate ( ) and makes it available to the arrangement ( ) for the further inspection of the semiconductor substrate ( ). In addition, the changer ( ) is not equipped with means for exact positioning of the semiconductor substrates ( ) in the workstations ( ).