The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Jan. 10, 2002
Masayuki Yoneda, Kanagawa, JP;
Nobuaki Honda, Kanagawa, JP;
Takeshi Fukiura, Kanagawa, JP;
Shoji Nagasaki, Kanagawa, JP;
Yamatake Corporation, Tokyo, JP;
Abstract
A semiconductor pressure sensor is presented. The pressure sensor includes a silicon substrate with a diaphragm that produces a distortion depending on the pressure. Strain gauges are provided on the main surface side of the silicon substrate with the diaphragm and are formed by conductive diffusion resistors different from the substrate. A getter is provided on the main surface side of the silicon substrate including the periphery of the strain gauges adjacent to the strain gauges. The getter includes the PN-junction area to which reverse bias is impressed so that the metal impurities of at least an Fe atom that are contained in the silicon substrate may be captured.