The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Sep. 07, 2000
Other;
Abstract
A process control device controls a plurality of processing devices placed in parallel to perform at least two process steps for consecutively processing workpieces in a lot. The process control device includes a device group information for grouping of a plurality of processing devices into a plurality of device groups. For example, when the workpieces are semiconductor devices, processing devices having identical deviating characteristics are grouped into the same group to perform a plurality of photolithographic steps. The process control device further includes a device group selecting unit for selecting the device group such that the lot is processed in the second process step using a processing device included in the same device group as a processing device used in the first process step.