The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Mar. 05, 2003
Jongwook Kye, Pleasanton, CA (US);
Alden Acheta, Brentwood, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
In one embodiment, a polarization measuring device comprises a light source, a reticle positioned below the light source, an opaque frame having a single aperture, the opaque frame positioned below the reticle, a lens positioned below the opaque frame, and a wafer having photoresist on its surface. The aperture of the frame allows no more than a first light ray to pass from the light source through the reticle and the lens onto a first surface point on the photoresist. The aperture of the frame also allows no more than a second light ray to pass from the light source through the reticle and the lens onto a second surface point on the photoresist. The degree of polarization of the light source can be determined from the first amount of light absorbed at the first surface point and the second amount of light absorbed at the second surface point.