The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Oct. 21, 2003
Applicant:
Inventors:
Paul A. Schneider, Dallas, TX (US);
Freidoon Mehrad, Plano, TX (US);
John H. MacPeak, Garland, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract
A method is described for forming a memory structure using a hardmask ( ). The hardmask ( ) protects the second polysilicon layer ( ) during a SAS etch process. In addition, sidewall structures ( ) are formed which protect the inter-polysilicon dielectric layer ( ) during the hardmask ( ) etch process.