The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
Apr. 16, 2001
Applicant:
Inventors:
Hirotake Yamada, Nagoya, JP;
Yuji Katsuda, Nagoya, JP;
Tsuneaki Ohashi, Nagoya, JP;
Masaaki Masuda, Nagoya, JP;
Masashi Harada, Nagoya, JP;
Hiroyuki Iwasaki, Nagoya, JP;
Shigenori Ito, Nagoya, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/04 ; B32B 1/800 ; B05D 1/02 ;
U.S. Cl.
CPC ...
B32B 9/04 ; B32B 1/800 ; B05D 1/02 ;
Abstract
A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.
Published as:
KR20010098643A; EP1158072A2; US2002018921A1; TW503449B; EP1158072A3; KR100429058B1; US6783875B2; EP1892318A1; EP1158072B1; DE60137885D1; EP1892318B1;