The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2004
Filed:
May. 16, 2003
Matthew Antoniou, Lake Forest, CA (US);
Bryan Christofferson, Orange, CA (US);
Advanced Thermal Sciences Corp., Anaheim, CA (US);
Abstract
A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PID) algorithms for interrelated but at times separate control of heating capabilities. The temperature control units operate with high power efficiency, because no heating energy is expended during cooling and non-transition modes. When approaching a temperature threshold, however, the heating algorithm is reinstated just long enough to provide minimum undershoot and enabling precise, low per consuming, steady state control at ±0.1° C., minimizing undershoot and enabling precise steady state control at ±0.1° C.