The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2004
Filed:
Aug. 19, 2002
Applicant:
Inventors:
Robert B. Hixson, Portland, OR (US);
Gary William Groshong, Brentwood, CA (US);
David Bruce Jordan, Alamo, CA (US);
Jose Luis Gonzalez, San Lorenzo, CA (US);
Assignee:
Set, Tosoh, Dublin, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; B05C 1/111 ;
U.S. Cl.
CPC ...
C23C 1/434 ; B05C 1/111 ;
Abstract
Disclosed is a shielding assembly for use within a substrate deposition processing chamber. The shielding assembly permits sputtering and evaporation processes to take place without the target material depositing upon the internal non-disposable surfaces of the chamber. The shielding assembly is of an improved construction which permits it to be uncoupled from an adapter plate without the need for removing the adapter plate from the deposition chamber.