The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2004
Filed:
Aug. 20, 2002
Carola Blaesing-Bangert, Huettenberg, DE;
Ulrich Kaczynski, Bad Nauheim, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
A coordinate measuring stage includes a stationary base part having a linear X guidance element, a center part slidable along the linear X guidance element, and an X-Y-positionable stage body for reception of a substrate, the X-Y positionable stage body being movable slidingly alone the Y guidance element. The center part is arranged in freely suspended fashion over the base part and supported at one end on the Y guidance element and with at another end on another support element. The Y guidance element, the other support element, and the stake body are supported, slidably and independently of one another, on the surface of the base part.