The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Apr. 17, 2000
Applicant:
Inventors:
Johannes C. Driessen, Eindhoven, NL;
Theodorus H. J. Bisschops, Eindhoven, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Marinus J. J. Dona, Veldhoven, NL;
Mark T. Meuwese, Geldrop, NL;
Ronald M. Schneider, Geldrop, NL;
Michel A. Mors, Eindhoven, NL;
Hugo M. Visser, Utrecht, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/754 ;
U.S. Cl.
CPC ...
G03B 2/754 ;
Abstract
A reference frame provided in a vacuum chamber is supported by support pillars extending through and isolated from the vacuum chamber walls to isolate the reference frame from vibrations in the vacuum chamber. The gap between the support pillar and the vacuum chamber wall may be sealed by a low-stiffness seal. The low stiffness seal may be a three part seal allowing relative motion in six-degrees of freedom.