The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Jun. 20, 2002
Kazutaka Yanagita, Yokohama, JP;
Takao Yonehara, Atsugi, JP;
Kazuaki Omi, Yokohama, JP;
Kiyofumi Sakaguchi, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention prevents defects generated when a bonded substrate stack having a separation layer is separated. A bonded substrate stack ( ) having a porous layer ( ) is separated in two steps of the first and second processes. In the first process, a jet is ejected to the porous layer ( ) while rotating the bonded substrate stack ( ) to partially separate the bonded substrate stack ( ) while leaving the central portion of the porous layer ( ) as an unseparated region. In the second process, the jet is ejected to the porous layer ( ) while rotation of the bonded substrate stack ( ) is stopped. A force is applied to the unseparated region from a predetermined direction to completely separate the bonded substrate stack ( ). Also, the first region (peripheral portion) and second region (central portion) of the bonded substrate stack ( ) having the porous layer ( ) are separated using a jet and ultrasonic wave, respectively. More specifically, the first region is separated by a jet ejected from a nozzle ( ) while rotating the bonded substrate stack ( ). On the other hand, the second region is separated by an ultrasonic wave generated by an ultrasonic vibrator ( ).