The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Mar. 17, 2003
Junji Iwasaki, Hyogo, JP;
Kazuyuki Mori, Hyogo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empty carrier by a built-in type wafer transport apparatus under the instruction of the host computer. The carrier in which the product wafer determined as being failed is accommodated is regarded as a rework lot by the host computer. Based on manufacturing standard information for rework held by the host computer, rework processing is performed through a wafer manufacturing operation. Therefore, such a semiconductor device manufacturing line results in that the carrier accommodating the product wafer is transferred and handled smoothly.