The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Dec. 02, 2002
Applicant:
Inventors:
Hsiao-Wen Lee, Hsinchu, TW;
Wen-I Wu, Hsinchu, TW;
Shih-Yi Wen, Taipei, TW;
Wu-Cheng Kuo, Hsinchu, TW;
Jui-Ping Weng, Hsinchu, TW;
Assignee:
Industrial Technology Research Institute, Hsinchu Hsien, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01P 1/10 ; H01H 5/900 ;
U.S. Cl.
CPC ...
H01P 1/10 ; H01H 5/900 ;
Abstract
A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.