The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Oct. 29, 2002
Applicant:
Inventors:
Ercan Adem, Sunnyvale, CA (US);
Fei Wang, San Jose, CA (US);
Joffre F. Bernard, Redwood City, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract
A conductive element of an integrated circuit wiring network is formed by a plating process. A seed layer for the conductive material is grown on the sidewalls and bottom surface of a trench using a low energy ion implantation process. The implantation is performed at an angle to the substrate to achieve coverage of the trench sidewalls. The resulting seed layer avoids constricting or closing the opening of the trench and has an approximately uniform thickness.