The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Jan. 15, 2003
Applicant:
Inventors:
Boon Y. Ang, Cupertino, CA (US);
Mehrdad Mahanpour, Union City, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ; G01R 3/126 ;
U.S. Cl.
CPC ...
H01L 2/166 ; G01R 3/126 ;
Abstract
Aspects for revealing active regions of a silicon-on-insulator (SOI) circuit for inspection from a backside of a DUT are described. The aspects include etching a substrate layer of an SOI circuit and removing a buried oxide layer beneath the substrate layer. From these steps, active regions beneath the buried oxide layer are revealed.