The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Dec. 20, 2002
Applicant:
Inventors:
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/176 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/176 ; H01L 2/14763 ;
Abstract
Dummy features ( ) are formed within an interlevel dielectric layer ( ). A non-gap filling dielectric layer ( ) is formed over the dummy features ( ) to form voids ( ) between dummy features ( ) or between a dummy feature ( ) and a current carrying region ( ). The dummy features ( ) can be conductive ( ) and therefore, formed when forming the current carrying region ( ). In another embodiment, the dummy features ( ) are insulating ( ) and are formed after forming the current carrying region ( ). In yet another embodiment, both conductive and insulating dummy features ( ) are formed. In a preferred embodiment, the voids ( ) are air gaps, which are a low dielectric constant material.