The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2004
Filed:
Oct. 15, 2002
Takayuki Kubo, Tokyo, JP;
Fumio Kawahigashi, Tokyo, JP;
Hiroshi Asano, Tokyo, JP;
Naohiro Takaoka, Tokyo, JP;
Sumitomo Mitsubishi Silicon Corporation, Tokyo, JP;
Abstract
An apparatus for growing a crystal, using the cooler surrounding the single crystal for high speed pulling. The cooler is prepared using a copper-based metal and is water cooled. The supporting arm that supports the cooler is prepared using stainless steel or the like, which is higher in mechanical strength than copper-based metals and is inferior in thermal conductivity, and is detachably connected to the cooler . Excessive cooling of the supporting arm and disposition due to precipitation of silicon oxide are prevented, leading to improvement in disposition free pulling rate without the prevention of speed-up. The cost of manufacture of the cooler is saved. The support strength of the cooler is improved.