The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
Jun. 19, 2003
Richard P. Volant, New Fairfield, CT (US);
David Angell, Poughkeepsie, NY (US);
Donald F. Canaperi, Bridgewater, CT (US);
Joseph T. Kocis, Pleasant Valley, NY (US);
Kevin S. Petrarca, Newburgh, NY (US);
Kenneth J. Stein, Sandy Hook, CT (US);
William C. Wille, Red Hook, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of fabricating and the structure of a micro-electromechanical switch (MEMS) device provided with self-aligned spacers or bumps is described. The spacers are designed to have an optimum size and to be positioned such that they act as a detent mechanism for the switch to minimize problems caused by stiction. The spacers are fabricated using standard semiconductor techniques typically used for the manufacture of CMOS devices. The present method of fabricating these spacers requires no added depositions, no extra lithography steps, and no additional etching.