The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
Oct. 30, 2002
Christine Hau-Riege, Fremont, CA (US);
Stefan Hau-Riege, Fremont, CA (US);
Amit P. Marathe, Fremont, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
For determining electromigration permeability of a layer material, a test line, a feeder line, and a cathode line of an interconnect test structure are formed with current flowing from the test line through the feeder line to the cathode line. A no-flux structure is disposed between the cathode line and the feeder line, and the layer material is disposed between the feeder line and the test line. A respective current density and length product of the feeder line and the test line is respectively less than and greater than a respective critical Blech length constant. An occurrence of a void within the feeder line or the test line indicates that the layer material is permeable or impermeable.