The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Dec. 11, 2001
Gabel Chong, Mountain View, CA (US);
Achintya Bhowmik, San Jose, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A method for fabricating a three-dimensional tapered optical waveguide and a three-dimensional tapered optical waveguide are shown and described. The fabrication method takes advantage of RIE lag to create a shaped trench in a lower cladding layer that has one end that is wider and deeper and than the opposite end. After the trench is filled with core material, a second RIE process is carried out which takes advantage of reverse RIE lag to etch the core material at a faster rate at the shallower and narrower end and at a slower rate at the wider and deeper end. The result is shaped core of a three-dimensional tapered optical waveguide that is wider and deeper at one end and tapers towards a shallower and narrower end for improved optical signal transmission.