The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Aug. 13, 2002
Applicant:
Inventor:
Kouichi Yamamoto, Yamaguchi, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01T 2/300 ;
U.S. Cl.
CPC ...
H01T 2/300 ;
Abstract
An electrostatic chuck comprises a sample stage provided with electrodes and for applying n-phase alternating voltage wherein n is equal to or greater than 2, and a circuit for applying the n-phase alternating voltage. The present electrostatic chuck realizes smooth and speedy attraction/separation of the substrate without the need for a charge elimination process, and the present chuck solves the problem of substrate vibration.
Quick Actions:
Yamamoto, Kouichi. (2004). Electrostatic chuck and method of treating substrate using electrostatic chuck (U.S. Patent No. 6760213). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6760213
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile