The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Feb. 24, 2003
Applicant:
Inventor:
Toshihiko Aoki, Kawasaki, JP;
Assignee:
Mitutoyo Corporation, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/100 ; H01L 3/1075 ;
U.S. Cl.
CPC ...
H01L 3/100 ; H01L 3/1075 ;
Abstract
The present invention has an object to provide a photoreceptor array with an excellent device property and no short fault between adjacent photoreceptors and to provide a method of manufacturing such the photoreceptor array with a high yield. On a transparent substrate ( ), a transparent electrode ( ) and a p-type amorphous silicon layer ( ) are formed. An insulating layer ( ) is deposited thereon to form a trench ( ). In the trench ( ), an i-type amorphous silicon layer ( ), an n-type amorphous silicon layer ( ) and an n-side electrode ( ) are buried in turn to form the photoreceptor array.