The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Oct. 28, 2002
Masato Kubodera, Nirasaki, JP;
Masaki Sohma, Nirasaki, JP;
Katsumi Sekiguchi, Nirasaki, JP;
Shigeru Kasai, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A heat treatment system for controlling the temperature in a processing vessel. The system includes a cylindrical processing vessel; a supporting table, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object to be processed; and a processing object heating part provided in the supporting table, for heating the object to be processed. In addition a thermoelectric conversion element capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater is provided in the side wall of the processing vessel, and a temperature control part for controlling the operations of the thermoelectric conversion element and the resistive heater is provided. Thus, it is not only possible to appropriately control the temperature in the processing vessel, but it is also possible to reduce space and energy, by combining the resistive heater with a thermoelectric conversion element.