The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Jul. 25, 2002
Katherina Babich, Chappaqua, NY (US);
Alessandro Callegari, Yorktown Heights, NY (US);
Stephen Alan Cohen, Wappingers Falls, NY (US);
Alfred Grill, White Plains, NY (US);
Christopher Vincent Jahnes, Monsey, NY (US);
Vishnubhai Vitthalbhai Patel, Yorktown Heights, NY (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
Katherine Lynn Saenger, Ossining, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for providing regions of substantially lower fluorine content in a fluorine containing dielectric is described incorporating exposing a region to ultraviolet radiation and annealing at an elevated temperature to remove partially disrupted fluorine from the region. The invention overcomes the problem of fluorine from a fluorine containing dielectric reacting with other materials while maintaining a bulk dielectric material of sufficiently high or original fluorine content to maintain an effective low dielectric constant in semiconductor chip wiring interconnect structures.