The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2004
Filed:
Sep. 12, 2001
Applicant:
Inventors:
Thomas Hantschel, Amesdorf, DE;
Wilfried Vandervorst, Mechelen, BE;
Assignee:
Interuniversitair Microelektronica Centrum (IMEC), Leuven, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 5/16 ;
U.S. Cl.
CPC ...
H01J 5/16 ;
Abstract
A full metal probe and a method of making the metal probe for electrical atomic force microscopy. In one embodiment, the method comprises manufacturing the full metal probe using two lithography steps. The step of etching thin membranes is dropped or eliminated to substantially reduce the processing time. Thus, topside processing is sufficient. The probe and tip can be peeled off from the wafer using a metallization procedure.