The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2004
Filed:
Nov. 09, 2000
Yoshitaka Nakamura, Ome, JP;
Isamu Asano, Iruma, JP;
Satoru Yamada, Ome, JP;
Tsugio Takahashi, Hamura, JP;
Yuzuru Ohji, Hinode, JP;
Masayoshi Hirasawa, Hachiouji, JP;
Takashi Yunogami, Niiza, JP;
Tomonori Sekiguchi, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Conduction reliability between a capacitor upper electrode and a plug connected to an upper layer wire is kept high to prevent connection defects and to reduce the resistance of the capacitor upper electrode. In a capacitor of a DRAM comprising a lower electrode made of ruthenium, a capacitor insulating film made of BST and an upper electrode , the upper electrode has a laminate structure comprising a ruthenium film formed on the side of the capacitor insulating film and a tungsten film formed over the former.