The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
Apr. 19, 2002
Applicant:
Inventor:
Rolf Hertling, Aachen, DE;
Assignee:
Steag ETA-Optik GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 1/124 ;
U.S. Cl.
CPC ...
G01B 1/124 ;
Abstract
In order to determine geometric structures and/or material parameters on or in substrates and in a locally resolved manner over the substrate surface, the invention provides the following measures: Measuring reflection and/or transmission light intensity values of the diffracted light according to the wavelength; calculating the reflection and/or transmission light intensity values using an iteration model into which the individual layer-structure and/or material parameters enter, and; modifying the parameters until the measured and calculated values coincide to the greatest possible extent.